• High throughput of 288 plates per hour
• Reduced mask costs.....">
spacer image spacer image spacer image spacer image spacer image spacer image spacer image spacer image spacer image spacer image spacer image
Contact UsContact details for Canon's European and global operations Semiconductor Equipment spacer image spacer image
spacer image spacer image spacer image
spacer image spacer image
         
spacer image spacer image
spacer image Home > Products spacer image spacer image
spacer image

MPA-8000

Mirror Projection Mask Aligner

Canon MPA-8000/8000CF - Mirror Projection Mask Aligner

Main Features:
• Supports 6th generation plate size (1,500mm×1,850mm)
• 37" wide in one shot
• High throughput of 288 plates per hour
• Reduced mask costs

The sixth generation plate size
Implementing a high-speed, high-accuracy glass plate stage utilizing large mirror projection systems and air-bearing linear motor drive. From this it is capable of exposing the eighth generation plate size of 1,500mm x 1,850mm, thus making it possible to expose six 37" panels and eight 32" panels wide TV in a single shot.

Capable of exposing up to 37" wide in one shot
By equipping the large mirror projection system, it is capable of exposing up to 37" wide TV panels without stitching marks. Since large LCDs can be exposed in a single shot, there are no restrictions in mask design and no more mask management and stitching accuracy maintenance, improving the efficiency of the production in whole.


Standard Specifications (Canon MPA-8000 / 8000CF)

Exposure System

Mirror: 1:1

Resolution/DoF

4µmL/S  /  ±30µm

Exposure Area

37" WideTV

Mask Size

Standard Mask  : 850mm x 1,200mm
Short Mask : 850mm x 1,000mm

Plate Size

1,500mm x 1,850mm

Dimension

W 8,000 x L 9,000 x H 4,910mm

Weight

80,000kg

 

 

spacer image
MPA platform
MPA-8000
MPA-8800
spacer image
spacer image spacer image spacer image
spacer image spacer image You Can Image spacer image spacer image
spacer image
spacer image
spacer image   © Copyright 2011   |   Terms and Conditions of use spacer image spacer image
spacer image spacer image spacer image spacer image
spacer image   © Copyright 2011   |   Terms and Conditions of use spacer image spacer image