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Stepper used in production for 7 years
To be fully refurbished (including Lens Replacement) with 6 months Warranty.
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Original Specifications |
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FPA-3000iW | i-line (365nm) Stepper | Resolution | 0.8 micron | NA | 0.24 | Overlay Accuracy | Mean + 3 sigma < 100nm | Field Size | 50mm x 50mm |
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