FPA-6000ES6a

The Canon FPA-6000ES6a KrF Step-and-Scan System is a 0.86-NA single-stage lithography tool designed for volume production of 300mm and 200mm wafers. In addition to having the highest NA KrF lens in the industry, it introduces several key improvements over previous models in its series: • 90nm resolution • 0.25micron DOF • 8nm overlay accuracy (Mean+3sigma)

Features

The day you will have to change to ArF process technology may be further away than you think. Canon has designed its FPA-6000ES6a Scanner to help extend your investments in KrF capital, experience and skill by one or perhaps even two technology nodes. If you need a few critical layers at the 90nm node, you can keep them on KrF with the ES6a.

Or, if you are moving to the 65nm node, you can -with the ES6a- replace perhaps one-third of the layers that would otherwise have to run on ArF. This is a significant advantage, given that the price of a KrF tool is about 40% less than ArF, the price of a KrF laser unit is about 75-80% less than ArF, and KrF is a mature process technology with per-layer processing costs that are roughly half that of ArF.