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FPA-3000EX4

FPA-3000 One (1) Stepper used in production for less than 1 month, then used for customer & staff training. To be fully refurbished with 6 months warranty. and One (1) Stepper used for production for 5 years then stored in warehouse. To be fully refurbished with 6 months warranty

Original Specifications

FPA-3000EX4

KrF (248nm) Stepper

Resolution

0.25 micron

NA

0.6

Overlay Accuracy

Mean + 3 sigma < 50nm

Field Size

22mm x 22mm



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FPA platform
FPA-7000AS7
FPA-7000AS5
FPA-6000AS4
FPA-6000ES6a
FPA-5000ES4b
FPA-5500iZa
FPA-5500iX
FPA-3000i5+
Refurbished Equipment
FPA-5000ES2+
FPA-5000ES2
FPA-3000EX4
FPA-3000iW
For more information
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