One (1) scanner used for demonstration and customer training only (never used in production), brand new condition with 6 months warranty.
FPA-5000ES2+
KrF (248nm) Scanner
Resolution
0.18 micron
NA
0.68
Overlay Accuracy
Mean + 3 sigma < 35nm
Field Size
26mm x 33mm
One (1) scanner used for demonstration and customer training only (never used in production), brand new condition with 6 months warranty.