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One (1) scanner used in production for 2 years then used for customer and staff training only. To be fully refurbished with 6 months warranty.
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Original Specifications |
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FPA-5000ES2 | KrF (248nm) Scanner | Resolution | 0.18 micron | NA | 0.68 | Overlay Accuracy | Mean + 3 sigma < 35nm | Field Size | 26mm x 33mm |
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