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Canon's presence at SEMICON Europa 2007 offers the opportunity for in-depth discussions with our experts on all aspects of the stepper and scanner both new and refurbished equipments. The new 200mm/300mm field-convertible equipment line-up will include: - FPA-7000 AS7 (ArF Immersion scanner)
- FPA-7000 AS5 (ArF Dry scanner)
- FPA-6000 ES6a (KrF Scanner)
- FPA-6000 ES5a (KrF Scanner)
- FPA-5510 iZ (Scanner Mix & Match i-line Stepper)
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