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MPA-8800

Mirror Projection Mask Aligner

Main Features:
• Supports 8th generation plate size
• 52" wide in one shot
• Reduced mask costs
• Stabilised resolution

The eighth generation plate size
Implementing a high-speed, high-accuracy glass plate stage utilizing large mirror projection systems and air-bearing linear motor drive. From this it is capable of exposing the eighth generation plate size of 2,160mm x 2,400mm, thus making it possible to expose six 52" panels and eight 45" panels wide TV in a single shot.

Capable of exposing up to 52" wide in one shot
By equipping the large mirror projection system, it is capable of exposing up to 52" wide TV panels without stitching marks. Since large LCDs can be exposed in a single shot, there are no restrictions in mask design and no more mask management and stitching accuracy maintenance, improving the efficiency of the production in whole.


Standard Specifications (Canon MPA-8800 / 8800CF)

Exposure System

Mirror: 1:1

Resolution/DoF

4µmL/S  /  ±30µm

Exposure Area

52" WideTV

Mask Size

Standard Mask  : 850mm x 1,200mm
Long Mask : 850mm x 1,400mm

Plate Size

2,160mm x 2,400mm

Dimension

W 8,400 x L 9,400 x H 5,400mm

Weight

90,000kg

 

 

Figure: plate size progression


MPA platform

MPA-8000
MPA-8800

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