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The day you will have to change to ArF process technology may be further away than you think. Canon has designed its FPA-6000ES6a Scanner to help extend your investments in KrF capital, experience and skill by one or perhaps even two technology nodes. If you need a few critical layers at the 90nm node, you can keep them on KrF with the ES6a. Or, if you are moving to the 65nm node, you can -with the ES6a- replace perhaps one-third of the layers that would otherwise have to run on ArF. This is a significant advantage, given that the price of a KrF tool is about 40% less than ArF, the price of a KrF laser unit is about 75-80% less than ArF, and KrF is a mature process technology with per-layer processing costs that are roughly half that of ArF.
SpecificationsFPA-6000ES6a | KrF (248nm) Scanner | Resolution | 90nm | NA | 0.86 – 0.55 (Automatically Variable) | Reticle Size | 6-inch (0.25-inch thickness) | Reduction Ratio | 4:1 | Field Size | 26mm x 33mm | Overlay Accuracy | 8nm | Throughput | 100 wph (300mm, 122 shots)
170 wph (200mm, 58 shots) |
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