The Canon FPA-5500iZa is a very high throughput 200/300mm i-line stepper that exposes scan-sized fields at resolutions down to 350nm. It offers the following design refinements and features not available in the preceding (iZ+) model:
• <16nm overlay (Mean + 3 sigma)
• Greater illumination intensity
• Faster stage-settling time
• Increased magnification of the off-axis alignment AA scope
Features
The FPA-5500iZa i-line stepper combines high throughput, the ability to expose a scan field in a single shot, and a proven cost-effective platform. The 300mm-capable iZa matches leading KrF and ArF step and scan systems with a 4:1 reduction ratio and a 26mm x 33mm field size. It works faster and is more cost effective than either an i-line scanner or two small-field steppers that have to stitch (in which case, add the advantage of having a single footprint).
