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The Canon FPA-5500iZa is a very high throughput 200/300mm i-line stepper that exposes scan-sized fields at resolutions down to 350nm. It offers the following design refinements and features not available in the preceding (iZ+) model:
• <16nm overlay (Mean + 3 sigma)
• Greater illumination intensity
• Faster stage-settling time
• Increased magnification of the off-axis alignment AA scope
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The FPA-5500iZa i-line stepper combines high throughput, the ability to expose a scan field in a single shot, and a proven cost-effective platform. The 300mm-capable iZa matches leading KrF and ArF step and scan systems with a 4:1 reduction ratio and a 26mm x 33mm field size. It works faster and is more cost effective than either an i-line scanner or two small-field steppers that have to stitch (in which case, add the advantage of having a single footprint).
Specifications
FPA-5500iZa | i-line (365nm) Stepper | Resolution | 350nm | NA | 0.57 – 0.45 (Automatically Variable) | Reticle Size | 6-inch (0.25-inch thickness) | Reduction Ratio | 4:1 | Field Size | 26mm x 33mm | Overlay Accuracy | Mean + 3 sigma < 16nm | Throughput | 93 wph (300mm, 122 shots)
155 wph (200mm, 58 shots) |
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