The FPA-3000i5+ is a high productivity mix-and-match Stepper designed to work seamlessly with Canon excimer-series Scanners and Steppers. Its wide-field lens with improved NA variability makes it an excellent investment. This extensively field-proven veteran of the Canon Stepper line-up has been a best-selling product since its release in 1996.
Features
High resolution, wide-field lens, extra NA variability, plus reticle options.
High alignment accuracy for CMP processes. Two off-axis methods in addition to Canon's original technology.
High throughput features include a six-axis non-contact FLAT (Fast Linear Air-guided Tilting) stage and on-the-fly smoothing focus.
Designed for high CoO and efficient operation which is achieved through common parameters for main-body structure, operation and maintenance. By partnering for example with the FPA-3000EX6 KrF Stepper the i5+ delivers truly optimized mix-and-match lithography.
